PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND PIEZOELECTRIC ELEMENT DEVICE

PROBLEM TO BE SOLVED: To provide a piezoelectric element having improved reliability, a liquid injection head, and a piezoelectric device.SOLUTION: A piezoelectric element comprises a diaphragm 50, a first electrode 60 provided above the diaphragm 50, a piezoelectric layer 70 provided above the firs...

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Bibliographic Details
Main Authors HIRAI EIKI, TAKABE HONKI, YOKOYAMA NAOTO, NAGANUMA YOICHI, NAKAYAMA MASAO
Format Patent
LanguageEnglish
Japanese
Published 10.08.2017
Subjects
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