PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND PIEZOELECTRIC ELEMENT DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric element having improved reliability, a liquid injection head, and a piezoelectric device.SOLUTION: A piezoelectric element comprises a diaphragm 50, a first electrode 60 provided above the diaphragm 50, a piezoelectric layer 70 provided above the firs...
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Main Authors | , , , , |
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Format | Patent |
Language | English Japanese |
Published |
10.08.2017
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Subjects | |
Online Access | Get full text |
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