PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND PIEZOELECTRIC ELEMENT DEVICE

• Main Authors: HIRAI EIKI, TAKABE HONKI, YOKOYAMA NAOTO, NAGANUMA YOICHI, NAKAYAMA MASAO
• Format: Patent
• Language: English; Japanese
• Published: 10.08.2017
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a piezoelectric element having improved reliability, a liquid injection head, and a piezoelectric device.SOLUTION: A piezoelectric element comprises a diaphragm 50, a first electrode 60 provided above the diaphragm 50, a piezoelectric layer 70 provided above the first electrode 60, and a second electrode 80 provided above the piezoelectric layer 70. The piezoelectric layer 70 comprises an active part which is sandwiched between the first electrode 60 and the second electrode 80 and in which at least an end part is defined by the first electrode 60, and a non-active part 320 provided outside the end part defining the active part of the first electrode 60. The diaphragm 50 includes a first vibration part 53 below the non-active part 320 and a second vibration part 54 outside the first vibration part 53. The second vibration part 54 includes a taper part 55 whose thickness increases toward the first vibration part 53.SELECTED DRAWING: Figure 5 【課題】信頼性の向上した圧電素子、液体噴射ヘッド及び圧電デバイスを提供する。【解決手段】振動板５０と、振動板５０の上方に設けられた第１電極６０と、第１電極６０の上方に設けられた圧電体層７０と、圧電体層７０の上方に設けられた第２電極８０とを備え、圧電体層７０は、第１電極６０と第２電極８０とで挟まれて少なくとも一端部が第１電極６０によって規定された能動部と、第１電極６０の能動部を規定する端部よりも外側に設けられた非能動部３２０とを有し、振動板５０は、非能動部３２０の下方の第１振動部５３と、第１振動部５３よりも外側の第２振動部５４とを備え、第２振動部５４は、第１振動部５３に向かって厚さが漸大したテーパー部５５を含む。【選択図】図５