PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND PIEZOELECTRIC DEVICE

PROBLEM TO BE SOLVED: To provide a piezoelectric element having improved reliability, a liquid injection head, and a piezoelectric device.SOLUTION: A piezoelectric element comprises a diaphragm 50, a first electrode 60 provided above the diaphragm 50, a piezoelectric layer 70 provided above the firs...

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Bibliographic Details
Main Authors HIRAI EIKI, TAKABE HONKI, YOKOYAMA NAOTO, NAGANUMA YOICHI, NAKAYAMA MASAO
Format Patent
LanguageEnglish
Japanese
Published 10.08.2017
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
ELECTRICITY
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:PROBLEM TO BE SOLVED: To provide a piezoelectric element having improved reliability, a liquid injection head, and a piezoelectric device.SOLUTION: A piezoelectric element comprises a diaphragm 50, a first electrode 60 provided above the diaphragm 50, a piezoelectric layer 70 provided above the first electrode 60, and a second electrode 80 provided above the piezoelectric layer 70. The diaphragm 50 comprises a first vibration part 53 below the piezoelectric layer 70, and a second vibration part 54 outside the first vibration part 53. The second vibration part 54 includes a taper part 55 whose thickness increases toward the first vibration part 53.SELECTED DRAWING: Figure 5 【課題】信頼性の向上した圧電素子、液体噴射ヘッド及び圧電デバイスを提供する。【解決手段】振動板５０と、振動板５０の上方に設けられた第１電極６０と、第１電極６０の上方に設けられた圧電体層７０と、圧電体層７０の上方に設けられた第２電極８０とを備え、振動板５０は、圧電体層７０の下方の第１振動部５３と、第１振動部５３よりも外側の第２振動部５４とを備え、第２振動部５４は、第１振動部５３に向かって厚さが漸大したテーパー部５５を含む。【選択図】図５
Bibliography:Application Number: JP20160018323