ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS

• Main Authors: SHIMIZU KAZUNORI, MIYAMOTO KAZUYOSHI, MIYAZAWA MASAKUNI
• Format: Patent
• Language: English; Japanese
• Published: 08.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To remove a substrate from an electrostatic chuck in a short time.SOLUTION: A mounting stage 20 of an electrostatic chuck 1, includes a substrate main body 21; and an electrostatic electrode 22 built in the substrate main body 21. The substrate main body 21 is made of ceramic c...