HEATER PLATE, MANUFACTURING APPARATUS FOR HEAT FLUX SENSOR EMPLOYING THE HEATER PLATE, MANUFACTURING METHOD OF THE HEATER PLATE, AND MANUFACTURING APPARATUS FOR THE HEATER PLATE

• Main Authors: GOKO MICHIHISA, SAKAIDA ATSUSUKE, TANIGUCHI TOSHIHISA, SHIRAISHI YOSHIHIKO, OKAMOTO KEIJI
• Format: Patent
• Language: English; Japanese
• Published: 08.06.2017
• Subjects: ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

PROBLEM TO BE SOLVED: To provide a heater plate capable of surely outputting a signal that is outputted from a terminal capable of outputting a signal, to the outside while heating an inspection object including the terminal with high accuracy in such a manner that a predetermined quantity of heat flows to the inspection object.SOLUTION: A heater plate 20 comprises: a sheet-like heat generation member 200 which generates heat when it is electrified; a protective film 23 provided at a side of one surface 201 of the sheet-like heat generation member 200 for protecting the sheet-like heat generation member 200; an output circuit part 25 that is provided on a face 231 of the protective film 23 at an opposite side of the sheet-like heat generation member 200; and a protrusion forming film 26 that is provided between the protective film 23 and the sheet-like heat generation member 200. The output circuit part 25 includes a protrusion 251 which is formed to be abutted to a terminal included in a heat flux sensor that is an inspection object. The protrusion forming film 26 includes a projection 261 at a position corresponding to the protrusion 251. The sheet-like heat generation member 200, the protective film 23, the output circuit part 25 and the protrusion forming film 26 are formed integral.SELECTED DRAWING: Figure 6 【課題】 信号を出力可能な端子を有する検査対象に所定の熱量が流れるよう検査対象を高精度に加熱しつつ当該端子が出力する信号を確実に外部に出力可能なヒータプレートを提供する。【解決手段】 ヒータプレート２０は、通電されると発熱するシート状発熱部材２００、シート状発熱部材２００の一方の面２０１側に設けられシート状発熱部材２００を保護する保護膜２３、保護膜２３のシート状発熱部材２００とは反対側の面２３１に設けられる出力回路部２５、及び、保護膜２３とシート状発熱部材２００との間に設けられる突出部形成膜２６を備える。出力回路部２５は、検査対象である熱流束センサが有する端子に当接可能なよう形成される突出部２５１を有する。突出部形成膜２６は、突出部２５１に対応する位置に突起２６１を有する。シート状発熱部材２００、保護膜２３、出力回路部２５、及び、突出部形成膜２６は、一体に形成されている。【選択図】 図６