VISUAL INSPECTION DEVICE AND VISUAL INSPECTION METHOD

• Main Author: FUJIWARA WATARU
• Format: Patent
• Language: English; Japanese
• Published: 08.06.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a visual inspection device capable of preventing such a situation in which abnormality of a principal plane of an electronic device cannot be easily detected due to halation, and capable of performing by one camera, visual inspection of the principal plane and a side surface, without changing a focus or changing a physical relationship of respective optical systems after a physical relationship of respective mirrors is adjusted.SOLUTION: A visual inspection device 100 performs visual inspection by switching visual inspection of a principal plane and visual inspection of a side surface, and comprises: a diffusion ring illumination device 110; a low angle illumination device 120; a first mirror 130; a second mirror 140; a half mirror 150; a camera 160; a filter 170 having a prescribed refraction index; and a mirror interval adjustment mechanism 180 for adjusting at least one of an interval between the first mirror 130 and the half mirror 150 and an interval between the second mirror 140 and the half mirror 150.SELECTED DRAWING: Figure 1 【課題】ハレーションにより電子デバイスの主面の異常が検出しにくくなることを防ぎ、かつ、各ミラーの位置関係を調整した後においては、ピントを変えたり電子デバイスや各光学系の位置関係を変えたりすることなく１つのカメラで主面の外観検査及び側面の外観検査を行うことができる外観検査装置を提供する。【解決手段】主面の外観検査と、側面の外観検査とを切替えて行う外観検査装置であって、拡散リング照明装置１１０と、ローアングル照明装置１２０と、第１ミラー１３０と、第２ミラー１４０と、ハーフミラー１５０と、カメラ１６０と、所定の屈折率を有するフィルタ１７０と、第１ミラー１３０とハーフミラー１５０との間の間隔、及び、第２ミラー１４０とハーフミラー１５０との間の間隔のうちの少なくとも一方を調整するミラー間隔調整機構１８０とを備える外観検査装置１００。【選択図】図１