CONVEYOR DEVICE, PROCESSING DEVICE, CONVEYING METHOD, AND PROCESSING METHOD

• Main Authors: YOSHIDA TAKUMI, TANAKA IWAO
• Format: Patent
• Language: English; Japanese
• Published: 08.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINED OPERATIONS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MACHINE TOOLS; MEASURING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; OTHER WORKING OF METAL; PERFORMING OPERATIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; TRANSPORTING; UNIVERSAL MACHINE TOOLS

PROBLEM TO BE SOLVED: To provide a conveyor device for conveying an object placed on a stage which allows efficient conveyance of the object with two stages without providing a return conveyance path.SOLUTION: A conveyor device 1 coveys an object between a first position P1, an intermediate position Pm, and a third position P3 which are sequentially arranged in a first direction, and a second position P2 adjacent to the intermediate position Pm in a second direction perpendicular to the first direction. First, one stage 10 is sequentially moved from the first position P1 to the second position P2, and then to the third position P3. Subsequently, another stage 10 is moved from the first position P1 to the second position P2. The previously moved stage 10 is then moved from the third position P3 to the first position P1. This allows efficient conveyance of an object 9 with two stages 10 without providing a separate return conveyance path.SELECTED DRAWING: Figure 1 【課題】対象物をステージ上に載置して搬送する搬送装置において、帰還用の搬送経路を設けることなく、２つのステージによる対象物の搬送を効率よく行うことができる技術を提供する。【解決手段】この搬送装置１は、第１方向に順に配置された第１位置Ｐ１、中間位置Ｐｍ、および第３位置Ｐ３と、中間位置Ｐｍから第１方向に対して交差する第２方向に隣接する第２位置Ｐ２との間で、対象物を搬送する。まず、第１位置Ｐ１、第２位置Ｐ２、および第３位置Ｐ３の順に１つのステージ１０を移動させ、続いて、他のステージ１０を第１位置Ｐ１から第２位置Ｐ２に移動させる。その後、先に移動させた１つのステージ１０を、第３位置Ｐ３から第１位置Ｐ１へ移動させる。これにより、帰還用の搬送経路を別に設けることなく、２つのステージ１０よる対象物９の搬送処理を、効率よく行うことができる。【選択図】図１