TRANSPORT DEVICE, PROCESSING DEVICE, AND TRANSPORT METHOD

PROBLEM TO BE SOLVED: To provide a technology of moving a stage while delivering the stage between a plurality of moving mechanisms in a transport device for transporting an object placed on the stage.SOLUTION: A transport device 1 includes a stage 10 for placing an object 9, rails 21-23 for guiding...

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Bibliographic Details
Main Authors YOSHIDA TAKUMI, TANAKA IWAO
Format Patent
LanguageEnglish
Japanese
Published 08.06.2017
Subjects
CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a technology of moving a stage while delivering the stage between a plurality of moving mechanisms in a transport device for transporting an object placed on the stage.SOLUTION: A transport device 1 includes a stage 10 for placing an object 9, rails 21-23 for guiding the stage 10 in a moving direction, and a plurality of moving mechanisms 31, 33 for moving the stage 10 in different directions from each other. Each of the moving mechanisms 31, 33 includes a fixing part fixed on the stage 10, and an attaching/detaching mechanism 55 for attaching/detaching the fixing part to/from the stage 10. Therefore, the stage 10 can be moved while the stage 10 is delivered between the plurality of moving mechanisms 31, 33.SELECTED DRAWING: Figure 3 【課題】ステージ上に載置された対象物を搬送する搬送装置において、複数の移動機構の間でステージを受け渡しながら、ステージを移動させることができる技術を提供する。【解決手段】この搬送装置１は、対象物９を載置するステージ１０と、ステージ１０を移動方向に案内するレール２１〜２３と、ステージ１０を互いに異なる向きに移動させる複数の移動機構３１，３３と、を備えている。移動機構３１，３３は、それぞれ、ステージ１０に固定される固定部と、固定部をステージ１０に対して着脱する着脱機構５５と、を有する。このため、複数の移動機構３１，３３の間でステージ１０を受け渡しながら、ステージ１０を移動させることができる。【選択図】図３
Bibliography:Application Number: JP20150237083