VIBRATION PIECE, VIBRATION ELEMENT, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOVABLE BODY AND MANUFACTURING METHOD FOR VIBRATION PIECE

• Main Authors: NAITO MATSUTARO, KOMINE KENJI
• Format: Patent
• Language: English; Japanese
• Published: 01.06.2017
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

PROBLEM TO BE SOLVED: To provide a small-sized vibration piece allowing an energy confinement effect in a Z'-axis direction of a mode of thickness shear vibration being main vibration in an AT-cut crystal vibration piece with an X-axis direction of a quartz crystal as long sides to be improved, and further to provide a manufacturing method therefor.SOLUTION: A manufacturing method for a vibration piece includes the steps of: preparing a rotation Y-cut crystal substrate constituted of a crystal flat plate having a surface including an X-axis being a crystal axis of a crystal and a Z'-axis obtained by rotating a Z-axis being a crystal axis to a Y-axis side of a Y-axis being a crystal axis with the X-axis as a rotational axis as a main surface and a Y'-axis direction obtained by rotating the Y-axis being the crystal axis to a Z-axis side of the Z-axis being the crystal axis with the X-axis as the rotational axis as a thickness; and performing etching on at least one of lateral surfaces intersecting with the Z'-axis such that at least four surfaces are formed on at least one of the lateral surfaces.SELECTED DRAWING: Figure 1 【課題】水晶結晶のＸ軸方向を長辺とするＡＴカット水晶振動片において、主振動である厚み滑り振動モードのＺ'軸方向におけるエネルギー閉じ込め効果を向上させることを可能とする小型の振動片及びその製造方法を提供する。【解決手段】水晶の結晶軸であるＸ軸と、前記Ｘ軸を回転軸として結晶軸であるＺ軸を結晶軸であるＹ軸の−Ｙ軸側へ回転して得られるＺ'軸とを含む面を主面とし、前記Ｘ軸を回転軸として結晶軸であるＹ軸を結晶軸である前記Ｚ軸の−Ｚ軸側へ回転して得られるＹ'軸方向を厚みとする水晶平板で構成されている回転Ｙカット水晶基板を準備し、前記Ｚ'軸と交差する少なくとも一方の側面に少なくとも４つの面が形成されるように前記側面をエッチングする。【選択図】図１