VIBRATION TYPE ANGULAR VELOCITY SENSOR

• Main Authors: IWAKI TAKAO, GOTO KATSUAKI
• Format: Patent
• Language: English; Japanese
• Published: 01.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SEMICONDUCTOR DEVICES; SURVEYING; TESTING

PROBLEM TO BE SOLVED: To suppress the unnecessary vibration of a movable part and improve detection accuracy while dispensing with a vibration-proof part by a separate member.SOLUTION: A groove 11a is formed in a support substrate 11, and a sensor part 100 is supported by an outer edge of the support substrate 11 via a spring part 11b. Thus, when in an unnecessary vibration mode the resonance frequency of which is smaller than the resonance frequency of a drive vibration caused by, for example, external impact or a detection vibration (i.e., a drive frequency or a detection frequency), the spring part 11b is mainly deformed rather than a beam part 40 to attenuate the unnecessary vibration. Therefore, it is possible to suppress the deformation of the beam part 40 when in the unnecessary vibration mode. Furthermore, since a vibration-proof structure is realized on the basis of the shape of the support substrate 11 for vibrations caused by impact from the outside, etc., detection accuracy can be improved without requiring a vibration-proof part by a separate member.SELECTED DRAWING: Figure 2 【課題】別部材による防振部を必要としなくても、可動部の不要振動を抑制し、検出精度を向上させる。【解決手段】支持基板１１に溝部１１ａを形成し、センサ部１００がバネ部１１ｂを介して支持基板１１の外縁部に支持された構造とする。これにより、例えば外部衝撃などに起因する駆動振動や検出振動の共振周波数（つまり駆動周波数や検出周波数）よりも共振周波数が小さな不要振動モードの際に、梁部４０よりもバネ部１１ｂが主に変形して不要振動を減衰できる。したがって、不要振動モードの際に梁部４０の変形を抑制することが可能となる。また、外部からの衝撃などに起因する振動に対しても、支持基板１１の形状に基づいて防振構造を実現していることから、別部材による防振部を必要としなくても、検出精度の向上が図れる。【選択図】図２