VIBRATION TYPE ANGULAR VELOCITY SENSOR

• Main Authors: SHIROMORI TOMOYA, IWAKI TAKAO
• Format: Patent
• Language: English; Japanese
• Published: 01.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; NAVIGATION; PERFORMING OPERATIONS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SEMICONDUCTOR DEVICES; SURVEYING; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a vibration type angular velocity sensor that can increase the amplitude accuracy.SOLUTION: A movable comb electrode 61 and a fixed comb electrode 64 form a first capacity, which changes gently in the entire region subject to drive vibration. Detecting coarse motions at vibrating positions based on the first capacity allows confirmation of vibrating positions in the entire region subject to drive vibration. Further, a movable flat electrode 62 and a fixed flat electrode 66 form a second capacity, which changes significantly when the second capacity becomes nearer to the vibration position where the vibration amount of the drive vibration becomes maximum. Detecting small motions based on the second capacity allows increase in accuracy of detecting the vibrational amplitude without increasing the number of circuit bits.SELECTED DRAWING: Figure 6 【課題】より振幅精度を向上させることが可能な振動型角速度センサを提供する。【解決手段】可動櫛歯電極６１と固定櫛歯電極６４とによって、駆動振動の全域において緩やかに変化する第１容量を構成する。この第１容量に基づいて振動位置の粗動検出を行うことで、駆動振動の全域において振動位置を確認する。また、可動平面電極６２と固定平面電極６６とによって、駆動振動の振動量が最も大きくなる振動位置に近づくと大きく変化する第２容量を構成する。この第２容量に基づいて微動検出を行うことで、回路ビット数を増やさなくても振動振幅の検出精度を高めることが可能となる。【選択図】図６