HYDROGEN PERMEATION PREVENTION FILM
PROBLEM TO BE SOLVED: To enable effective prevention of hydrogen permeation using a thinner film.SOLUTION: A hydrogen permeation prevention film comprises an amorphous nickel film 101 and a diamond-like carbon (DLC) film 102 laminated on the nickel film 101. The DLC film 102 is formed abutting the n...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
25.05.2017
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To enable effective prevention of hydrogen permeation using a thinner film.SOLUTION: A hydrogen permeation prevention film comprises an amorphous nickel film 101 and a diamond-like carbon (DLC) film 102 laminated on the nickel film 101. The DLC film 102 is formed abutting the nickel film 101. The nickel film 101 may have a thickness of approximately 3-5 μm. The DLC film 102 may have a thickness of approximately 1-3 μm. As such, a total thickness of the hydrogen permeation prevention film shall be 4-8 μm.SELECTED DRAWING: Figure 1
【課題】より薄い膜で効果的に水素透過が防止できるようにする。【解決手段】水素透過防止膜は、アモルファス状態のニッケル膜101と、ニッケル膜101に積層されたダイヤモンドライクカーボン(DLC)膜102とを備える。ニッケル膜101に接してDLC膜102が形成されている。ニッケル膜101は、厚さ3〜5μm程度とすればよい。DLC膜102は、厚さ1〜3μm程度とすればよい。従って、水素透過防止膜の全厚は、4〜8μm程度となる。【選択図】 図1 |
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Bibliography: | Application Number: JP20150223769 |