MEMS ELEMENT

• Main Authors: ARAKI SHINICHI, USUI TAKAHIDE
• Format: Patent
• Language: English; Japanese
• Published: 13.04.2017
• Subjects: BASIC ELECTRIC ELEMENTS; DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a MEMS element which does not cause a decrease in sensitivity.SOLUTION: An air gap is formed by arranging on a substrate a back plate including a fixed electrode and a movable electrode with a spacer interposed therebetween, and an annular protrusion protruding toward the air gap side is provided at least at one of the back plate and the movable electrode. The protrusion is arranged so as to protrude into a peripheral space on a spacer side from a slit formed in the movable electrode.SELECTED DRAWING: Figure 2 【課題】 感度低下が発生しないＭＥＭＳ素子を提供する。【解決手段】 基板上にスペーサーを挟んで固定電極を含むバックプレートと可動電極とを配置することでエアーギャップを形成し、バックプレートあるいは可動電極の少なくともいずれか一方に、エアーギャップ側に突出する環状の突起部を備える。この突起部は、可動電極に形成されたスリットよりスペーサー側の周辺空間に突出するように配置する。【選択図】 図２