LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD

• Main Authors: NAKAGAWA MITSUGI, YAMAMOTO SETSUO, YOSHIDA HAJIME, OSAKO SHINJI, KURISU SHINKI
• Format: Patent
• Language: English; Japanese
• Published: 13.04.2017
• Subjects: MEASURING; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

PROBLEM TO BE SOLVED: To provide a device and a method of micro leakage inspection using a gas or liquid having a molecule amount larger than helium.SOLUTION: The leakage inspection includes the steps of: placing a test subject S in a test subject vacuum chamber 21; after hermetically sealing the test subject vacuum chamber 21, evacuating by vacuum evacuation means 33; pressurizing and supplying a probe fluid from the exploration fluid pressure application/recovery system 1 to the device under test S; and measuring a partial pressure of the probe fluid leaked from the device under test S by a gas detection means 32. As the gas detecting means 32, a highly durable gas detecting means operable in an ultrahigh vacuum to a medium vacuum is used. A gas detection means operable in the vacuum region from an ultrahigh vacuum to 1 Pa order may be used depending on the connection configuration of vacuum evacuation means.SELECTED DRAWING: Figure 1(a) 【課題】ヘリウムよりも分子量の大きい気体または液体を探査流体として用いた漏れ検査装置において、微量漏れ検査装置と方法を提供する。【解決手段】被試験体真空室２１内に被試験体Ｓを配置し、被試験体真空室２１を密閉した状態で真空排気手段３３により真空排気し、被試験体Ｓに探査流体加圧・回収システム１から探査流体を加圧供給し、被試験体Ｓから漏れ出た探査流体の分圧をガス検出手段３２により測定し漏れ検査を行う。ガス検出手段３２としては、超高真空から中真空で稼働可能な高耐久ガス検出手段を用いるが、真空排気手段の接続形態に応じて超高真空から１Ｐａオーダーの真空領域で稼働可能なガス検出手段を用いることができる。【選択図】図１（ａ）