EXPOSURE DEVICE

• Main Author: MATSUNAGA SHINICHI
• Format: Patent
• Language: English; Japanese
• Published: 06.04.2017
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CINEMATOGRAPHY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PRINTED CIRCUITS

PROBLEM TO BE SOLVED: To provide a compact exposure device for exposing both surfaces of a substrate.SOLUTION: Provided is an exposure device which includes: exposure means that irradiates exposure light to an exposure area; a stage for loading a substrate; driving means that moves the stage relative to the exposure means to bring the substrate to the exposure area; and substrate reverse means that is provided on a moving path of the stage by being adjacent to the exposure means, in which the substrate reverse means includes means that holds the exposed substrate and reverses the substrate.SELECTED DRAWING: Figure 1 【課題】 基板の両面を露光する、コンパクトな露光装置を提供する。【解決手段】 露光装置を、露光領域に露光光を照射する露光手段と、基板を載置するステージと、前記露光手段に対し前記ステージを相対的に移動させ、前記基板を前記露光領域に持ちきたす駆動手段と、前記ステージの移動経路上にあり、前記露光手段に隣接して設けられた基板反転手段を備え、前記基板反転手段は露光された基板を保持し、該基板を反転させる手段を有する構成とする。【選択図】図１