EXPOSURE DEVICE
PROBLEM TO BE SOLVED: To provide a compact exposure device for exposing both surfaces of a substrate.SOLUTION: Provided is an exposure device which includes: exposure means that irradiates exposure light to an exposure area; a stage for loading a substrate; driving means that moves the stage relativ...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
06.04.2017
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a compact exposure device for exposing both surfaces of a substrate.SOLUTION: Provided is an exposure device which includes: exposure means that irradiates exposure light to an exposure area; a stage for loading a substrate; driving means that moves the stage relative to the exposure means to bring the substrate to the exposure area; and substrate reverse means that is provided on a moving path of the stage by being adjacent to the exposure means, in which the substrate reverse means includes means that holds the exposed substrate and reverses the substrate.SELECTED DRAWING: Figure 1
【課題】 基板の両面を露光する、コンパクトな露光装置を提供する。【解決手段】 露光装置を、露光領域に露光光を照射する露光手段と、基板を載置するステージと、前記露光手段に対し前記ステージを相対的に移動させ、前記基板を前記露光領域に持ちきたす駆動手段と、前記ステージの移動経路上にあり、前記露光手段に隣接して設けられた基板反転手段を備え、前記基板反転手段は露光された基板を保持し、該基板を反転させる手段を有する構成とする。【選択図】図1 |
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Bibliography: | Application Number: JP20150190793 |