PHYSICAL QUANTITY SENSOR

• Main Authors: YAMAMOTO YASUO, IWAKI TAKAO
• Format: Patent
• Language: English; Japanese
• Published: 06.04.2017
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a physical quantity sensor that uses a SAW element enabling achievement of miniaturization of a device.SOLUTION: A structure enabling an output of a SAW in two directions relative to one piezoelectric substrate 2 is achieved by one IDT 3. Specifically, the structure is shaped into a form having each of come-like teeth parts 31a and 32b of each of come-like teeth electrodes 31 and 32 constituting the IDT 3 bended, and a first SAW and second SAW are configured so as to be output in two directions of an X-direction and Y-direction from each bended part. Accordingly, only one IDT 3 is provided relative to one piezoelectric substrate 2 to enable the output of the SAW in the two directions, thereby enabling the miniaturization of a device.SELECTED DRAWING: Figure 1 【課題】装置の小型化を図ることが可能なＳＡＷ素子を用いた物理量センサを提供する。【解決手段】１枚の圧電基板２に対して、２方向のＳＡＷを出力できる構造を１つのＩＤＴ３によって実現する。具体的には、ＩＤＴ３を構成する各櫛歯電極３１、３２の各櫛歯部３１ｂ、３２ｂを曲げられた形状とし、曲げられた各部からｘ方向とｙ方向の２方向に第１ＳＡＷと第２ＳＡＷが出力されるようにする。これにより、１枚の圧電基板２に対して１つのＩＤＴ３を備えるだけで、２方向へのＳＡＷの出力が可能となり、装置の小型化を図ることが可能となる。【選択図】図１