PIEZOELECTRIC ELEMENT UTILIZATION DEVICE AND MANUFACTURING METHOD THEREFOR

• Main Authors: IIDA JOJI, ASHIKAGA KINYA
• Format: Patent
• Language: English; Japanese
• Published: 02.03.2017
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a piezoelectric element utilization device capable of suppressing increase in the leakage current.SOLUTION: An ink jet print head 1 includes an actuator substrate 2 having a pressure chamber (cavity) 7, a movable film formation layer 10 placed on the pressure chamber 7 and including a movable film 10A sectioning the top surface of the pressure chamber 7, and a piezoelectric element 9 formed on the movable film 10A. The piezoelectric element 9 includes a lower electrode 11 formed on the movable film 10A, a piezoelectric film 12 formed on the lower electrode 11, and an upper electrode 13 formed on the piezoelectric film 12. The piezoelectric film 12 includes an active part 12A having an upper surface in contact with the lower surface of the upper electrode 13, and a non-active part 12B led out from the whole circumference of the side part of the active part 12A, in the direction along the surface of the movable film formation layer 10, and thinner than the active part 12A.SELECTED DRAWING: Figure 2 【課題】リーク電流の増加を抑制できる圧電素子利用装置を提供する。【解決手段】インクジェットプリントヘッド１は、圧力室（キャビティ）７を有するアクチュエータ基板２と、圧力室７上に配置されかつ圧力室７の天面部を区画する可動膜１０Ａを含む可動膜形成層１０と、可動膜１０Ａ上に形成された圧電素子９とを含む。圧電素子９は、可動膜１０Ａ上に形成された下部電極１１と、下部電極１１上に形成された圧電体膜１２と、圧電体膜１２上に形成された上部電極１３とを含む。圧電体膜１２は、上面が上部電極１３の下面に接した能動部１２Ａと、能動部１２Ａの側部の全周囲から、可動膜形成層１０の表面に沿う方向に引き出され、記能動部１２Ａよりも厚さが薄い非能動部１２Ｂとを含む。【選択図】図２