METAL FILLING DEVICE AND METAL FILLING METHOD

• Main Authors: IMAI OSAMU, ARATA KAZUHIKO, YAMAGUCHI MASATAKA
• Format: Patent
• Language: English; Japanese
• Published: 09.02.2017
• Subjects: BASIC ELECTRIC ELEMENTS; CASTING; CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; POWDER METALLURGY; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a metal filling device that is able to improve yield and processing efficiency in metal filling processing.SOLUTION: This metal filling device 100 for filling molten metal 3 into a minute space 2 formed so as to open in the surface of a wafer 1, comprises: a holding part 11 that holds the wafer 1; a cylindrical member 12 surrounding the periphery of the minute space 2; a pressure member 13 arranged on the inside of the cylindrical member 12 so as to advance toward or retract from the wafer 1; and a metal supply part 14 that supplies molten metal 3 into a processing chamber 4 defined by the holding part 11 or wafer 1, cylindrical member 12, and the pressure member 13 so as to be airtight. The metal filling device 100 is configured such that molten metal 3 supplied into the processing chamber 4 is cooled while pressurized by the pressing member 13, and the pressurization is stopped before the solidifying of the molten metal 3 is finished.SELECTED DRAWING: Figure 7 【課題】金属充填処理の歩留まりや処理効率の向上を図ることが可能な金属充填装置を提供する。【解決手段】この金属充填装置１００は、ウェハ１の表面に開口するように形成された微小空間２内に溶融金属３を充填する金属充填装置であって、ウェハ１を保持する保持部１１と、微小空間２の周囲を取り囲む筒状部材１２と、筒状部材１２の内側にウェハ１に向けて進退可能に配置された加圧部材１３と、保持部１１またはウェハ１と、筒状部材１２と、加圧部材１３とにより気密状に形成される処理室４内に、溶融金属３を供給する金属供給部１４とを備える。金属充填装置１００は、処理室４内に供給された溶融金属３を加圧部材１３により加圧しながら冷却し、溶融金属３の凝固が完了する前に加圧を停止するように構成されている。【選択図】図７