POSITION MEASUREMENT DEVICE, DATA CORRECTION DEVICE, POSITION MEASUREMENT METHOD, AND DATA CORRECTION METHOD

PROBLEM TO BE SOLVED: To provide a technique capable of detecting the center lines of patterns more accurately.SOLUTION: The position measurement device includes: an image storage unit which stores a two-dimensional image D3 acquired by capturing an object; an operation unit 32 which calculates a ce...

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Bibliographic Details
Main Author TANIGUCHI KAZUTAKA
Format Patent
LanguageEnglish
Japanese
Published 09.02.2017
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CALCULATING
CINEMATOGRAPHY
COMPUTING
COUNTING
ELECTROGRAPHY
HOLOGRAPHY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
MATERIALS THEREFOR
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a technique capable of detecting the center lines of patterns more accurately.SOLUTION: The position measurement device includes: an image storage unit which stores a two-dimensional image D3 acquired by capturing an object; an operation unit 32 which calculates a center position D12 of a pattern in an x-direction in a prescribed y coordinates from a profile of a one-dimensional pixel value distribution of a pattern included in the image D3 and its periphery in the x-direction in the prescribed y coordinates; and a center-line acquiring unit 33 which acquires a center line D13 of the pattern extended in a y-direction from a plurality of center positions D12 calculated by the operation unit 32 for a plurality of y coordinates. The operation unit 32 models the one-dimensional pixel value distribution with a partially differentiable model function having a top-hat shape profile and determines a plurality of coefficients contained in the model function by an optimization method.SELECTED DRAWING: Figure 6 【課題】より正確に図形の中心線を検出できる技術を提供する。【解決手段】この位置計測装置は、対象物を撮像した二次元画像Ｄ３を記憶する画像記憶部と、画像Ｄ３に含まれる図形およびその周辺の所定のｙ座標におけるｘ方向の一次元画素値分布のプロファイルから図形の前記所定のｙ座標におけるｘ方向の中心位置Ｄ１２を算出する演算部３２と、複数のｙ座標に対して演算部３２の算出した複数の中心位置Ｄ１２から、ｙ方向に延びる図形の中心線Ｄ１３を取得する中心線取得部３３とを備える。演算部３２は、一次元画素値分布を、トップハット形状のプロファイルを有する偏微分可能なモデル関数にてモデル化し、モデル関数に含まれる複数の係数を最適化法にて決定することにより取得する。【選択図】図６
Bibliography:Application Number: JP20150150290