MEASUREMENT DEVICE AND MEASUREMENT METHOD

• Main Authors: TOKIMITSU TAKUMI, KITAMURA TSUTOMU
• Format: Patent
• Language: English; Japanese
• Published: 09.02.2017
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a measurement device that is advantageous to measurement accuracy.SOLUTION: A measurement device 1 measuring a shape of a measured workpiece 5 includes: a projection unit 2 that has a bright part and dark part alternatively arranged, includes an identification unit identifying each of the bright and dark parts, and projects pattern light onto the measured workpiece 5; an imaging unit 3 that shoots the measured workpiece 5 having the pattern light projected, and acquires an image including a portion corresponding to the pattern light; and a processing unit 4 that obtains information on the shape of the measured workpiece 5 on the basis of the image. The processing unit 4 is configured to specify at least one position of a position where luminance is maximum, a position where the luminance is minimum, a position where a slope of a luminance distribution of the image is maximum and a position where the slope of the luminance distribution thereof is minimum from the luminance distribution of the image; calculate a distance between the specified position and a position of the identified unit; use the calculated distance and an amount of correction to be determined based on a preliminarily obtained distance from the position of the identification unit to correct the specified position; and obtain information on the shape of the measured workpiece 5 on the basis of the corrected position.SELECTED DRAWING: Figure 1 【課題】計測精度の点で有利な計測装置を提供する。【解決手段】被計測物５の形状を計測する計測装置１であって、明部と暗部とが交互に配置され、それぞれを識別する識別部を含むパターン光を被計測物５に投影する投影部２と、パターン光が投影された被計測物５を撮像して、パターン光に対応する部分を含む画像を取得する撮像部３と、画像に基づいて、被計測物５の形状の情報を求める処理部４と、を有し、処理部４は、画像の輝度分布から、輝度が最大となる位置および最小となる位置、輝度分布の勾配が最大となる位置および最小となる位置、のうち、少なくとも１つの位置を特定し、特定された位置と識別部の位置との距離を算出し、算出された距離と、予め求めておいた識別部の位置からの距離に基づいて定まる補正量と、を用いて、特定された位置を補正し、補正された位置に基づいて被計測物５の形状の情報を求める。【選択図】図１