MEMS ELEMENT

• Main Authors: ARAKI SHINICHI, FUKUTOME TAKAO
• Format: Patent
• Language: English; Japanese
• Published: 02.02.2017
• Subjects: BASIC ELECTRIC ELEMENTS; DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide an MEMS element capable of improving sensitivity without causing characteristic changes even when heat treatment is performed during change in diameter, manufacturing, and mounting process.SOLUTION: One of a fixed electrode and a movable electrode 3 has a laminated structure in which a dielectric film 11 is sandwiched between a first electrode 13 and a second electrode. In addition, a plurality of openings 14 are formed in the first electrode arranged on an air gap side to expose a part of the dielectric film. A desired voltage is applied to the first electrode and the second electrode from voltage applying means so as to polarize the dielectric film.SELECTED DRAWING: Figure 2 【課題】径時変化や製造、実装工程で加熱処理を行っても特性変化が生じることなく感度の向上を図ることができるＭＥＭＳ素子を提供する。【解決手段】固定電極あるいは可動電極３のいずれか一方の電極を第１の電極１３と第２の電極によって誘電体膜１１を挟んだ積層構造としている。また、エアーギャップ側に配置された第１の電極には、複数の開口部１４が形成され、誘電体膜の一部を露出する。電圧印加手段から第１の電極と第２の電極に、誘電体膜が分極する程度の所望の電圧を印加する。【選択図】図２