ADSORPTION DEVICE AND ANALYZER

• Main Authors: KISHIDA SATORU, LEE SANG-SEOK, MIYASHITA HIDETOSHI, SEKI MASASHI
• Format: Patent
• Language: English; Japanese
• Published: 19.01.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an analyzer capable of performing analysis with high accuracy in a short time.SOLUTION: An adsorption device 2 comprises: a cell 20 which includes a substrate and a sealing member joined to the substrate to form a hollow structure together with the substrate and is provided with first and second through holes through which an inside space and an outside space of the hollow structure communicate with each other; a plurality of carbon nano-tube bundles which extend from the substrate in the inside space and are located apart from each other; and a heater 23 provided on at least one of the substrate and the sealing member.SELECTED DRAWING: Figure 1 【課題】高い精度で且つ短時間での分析が可能な分析装置を提供する。【解決手段】吸着装置２は、基材と、前記基材に接合され、前記基材とともに中空構造を形成している封止部材とを含み、前記中空構造の内部空間と外部空間とを各々が連絡する第１及び第２貫通孔が設けられたセル２０と、前記内部空間において前記基材から伸び、互いから離れて位置した複数のカーボンナノチューブ束と、前記基材及び前記封止部材の少なくとも一方に設けられたヒータ２３とを具備する。【選択図】図１