ATMOSPHERIC PRESSURE PLASMA IRRADIATION DEVICE

• Main Authors: DEN SHOJI, KANO HIROYUKI, HORI MASARU
• Format: Patent
• Language: English; Japanese
• Published: 12.01.2017
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

PROBLEM TO BE SOLVED: To facilitate manufacture and to adjust thickness of a cross section or a gas layer flow in a discharge region.SOLUTION: An atmospheric pressure plasma irradiation device comprises: a first base 10 which includes a hollow part 11 extending in a length direction at a central part of a width of a principal surface, has a rectangular parallelepiped shape and is made of resin; a first filling plate 12, for a heat resistant insulation material, having a rectangular parallelepiped shape of which the surface becomes the same surface as the principal surface; a pair of discharge region partition plates 13a and 13b of the heat resistant insulation material which are disposed on a top face of the first base and a top face of the first filling plate while providing a first slit-like gap along both sides of the first base in parallel with a first direction; a pair of second discharge region partition plates 17a and 17b which are disposed on a spacer while providing a second slit-like gap; a second base 20 of the same configuration as the first base; and a second filling plate 22. The atmospheric pressure plasma irradiation device also comprises: a pair of electrode holding members 3a and 3b which are provided in both ends of the first base and the second base in the first direction and hold an electrode which generates plasma by incurring discharge of a gas, in a through-hole extending in the first direction; and a gas supply member which supplies the gas to a planar gap.SELECTED DRAWING: Figure 1 【課題】製造を容易にし、放電領域の断面やガス層流の厚さを調整可能とする。【解決手段】主面の幅の中央部に長手方向に伸びた中空部１１を有した直方体形状の樹脂製の第１基台１０と、中空部に充填されて表面が主面と同一面となる直方体形状の耐熱絶縁材料の第１充填板１２と、第１基台の上面及び第１充填板の上面に、第１基台の第１方向に平行な両辺に沿って第１スリット状間隙を設けて配設された耐熱絶縁材料の一対の第１放電領域区画板１３ａ、１３ｂと、スペーサ上に、第２スリット状間隙を設けて配設され、一対の第２放電領域区画板１７ａ、１７ｂと、第１基台と同一構成の第２基台２０と第２充填板２２を有する。第１基台及び第２基台の第１方向の両端に設けられ、ガスの放電を生起させてプラズマを発生させる電極を第１方向に伸びた貫通孔により保持した一対の電極保持部材３ａ、３ｂと、面状間隙にガスを供給するガス供給部材と、を有する。【選択図】図１