OPTICAL WAVEGUIDE DEVICE
PROBLEM TO BE SOLVED: To provide an optical waveguide type device in which grooves do not impose constraints to circuit arrangement even when a plurality of grooves into which a thin-film element is inserted are formed on a substrate having an optical interference circuit, and which does not require...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English Japanese |
Published |
12.01.2017
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide an optical waveguide type device in which grooves do not impose constraints to circuit arrangement even when a plurality of grooves into which a thin-film element is inserted are formed on a substrate having an optical interference circuit, and which does not require adjusting the amount of a filler for each groove, and the manufacturing process of which is not complicated.SOLUTION: At least one groove 25, 26, 27 of the optical waveguide type device is formed so as to cross only corresponding one length of optical waveguide 23, 24, 28a into which a thin-film element is inserted and not to cross an other optical waveguide adjacent to the corresponding one length of optical waveguide. A groove 25, 26, 27 is approximately rectangular, and made to a minimum that suits the size of a thin-film element that is inserted so that the thin-film element can be stably held and secured inside the groove 25, 26, 27. An extension part continuously formed from the groove 25, 26, 27 is provided on at least one of ends of the rectangular groove 25, 26, 27.SELECTED DRAWING: Figure 2
【課題】光干渉回路を有する基板に、薄膜素子を挿入する複数の溝を形成しても、溝が回路配置上の制約となることがなく、溝ごとに充填剤量の調整が必要とせず、製造工程が煩雑にならない光導波路型デバイスを提供する。【解決手段】光導波路型デバイスは、少なくとも1つの溝25、26、27は、薄膜素子を挿入する対応する1本の光導波路23、24、28aのみを横切り、対応する1本の光導波路に隣接する他の光導波路を横切らないよう構成される。溝25、26、27は概ね矩形状で、溝25、26、27内に薄膜素子を安定して保持・固定できるように、挿入される薄膜素子のサイズに適合した最小のものとする。矩形状の溝25、26、27の少なくともいずれかの端部には、溝25、26、27から連続して形成された拡張部を備える。【選択図】図2 |
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Bibliography: | Application Number: JP20150127915 |