METHOD FOR CALIBRATING PARTICLE COMPOSITE ANALYSIS DEVICE, AND PARTICLE COMPOSITE ANALYSIS DEVICE

• Main Authors: HASEGAWA YOSHIKI, ASANO TAKAMASA, TAKEDA NAOKI, KOIZUMI KAZUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 12.01.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a method for calibrating a particle composite analysis device and the particle composite analysis device which, in the particle composite analysis device suitable for the multidirectional analysis of measurement object particles, makes it possible to carry out simply with high accuracy the calibration of a device to be periodically performed in order to maintain and improve device reliability.SOLUTION: This particle composite analysis device comprises a particle measurement device 10 and a particle component analysis device 20. Calibration particles whose number, size and component at least are known are introduced into the particle measurement device 10 and the particle component analysis device 20, and analysis of each is carried out, the sensitivity of the particle measurement device 10 being calibrated on the basis of the number and size of the calibration particles measured by the particle measurement device 10, the sensitivity of the particle component analysis device 20 being calibrated on the basis of the component amount of the calibration particles measured by the particle component analysis device 20. Furthermore, the irradiation axis to a capture medium 23 of the particles introduced into the particle component analysis device 20 is calibrated on the basis of the state of capture of the calibration particles to the capture medium 23 of the particle component analysis device 20.SELECTED DRAWING: Figure 1 【課題】測定対象粒子を多角的に分析すのに適した粒子複合分析装置において、装置の信頼度を維持、向上させるために定期的に行うことが必要な装置の校正の操作を、簡便かつ正確に行うことができるようにした、粒子複合分析装置の校正方法及び粒子複合分析装置を提供する。【解決手段】この粒子複合分析装置では、粒子計測装置１０と粒子成分分析装置２０とを備え、粒子計測装置１０と粒子成分分析装置２０に、少なくとも数、大きさ、及び成分が既知の校正粒子を導入してそれぞれの分析を行い、粒子計測装置１０により測定された校正粒子の数と大きさに基づいて、粒子計測装置１０の感度を校正し、粒子成分分析装置２０により測定された校正粒子の成分量に基づいて、粒子成分分析装置２０の感度を校正する。また、粒子成分分析装置２０の捕捉体２３への校正粒子の捕捉状態に基づいて、粒子成分分析装置２０に導入する粒子の捕捉体２３に対する照射軸を校正する．【選択図】図１