CHARGED PARTICLE BEAM DEVICE

• Main Authors: TOMIMATSU SATOSHI, ONISHI TAKESHI
• Format: Patent
• Language: English; Japanese
• Published: 05.01.2017
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROLLING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; PHYSICS; REGULATING; SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES

PROBLEM TO BE SOLVED: To provide a charged particle beam device using a high-voltage power supply having a different principle from a Cockcroft-Walton circuit.SOLUTION: The present invention relates to a charged particle beam device which comprises a plurality of series-connected photoelectric conversion elements and a high-voltage power supply having a light source, and applies a charged particle source with a high voltage generated by the plurality of photoelectric conversion elements with light emitted from the light source. According to the present invention, the output high voltage includes no AC component, and charged particles emitted from a charged particle beam are accelerated having only an energy spread that the charged parts originally have, so neither deterioration in beam converging performance nor deterioration in energy resolution is caused. Consequently, the charged particle beam device has high beam converging performance and high energy analyzing performance, and can be made compact.SELECTED DRAWING: Figure 1 【課題】 本発明の目的は、コッククロフト・ウォルトン回路と異なる原理の高圧電源を用いた荷電粒子線装置を実現することに関する。【解決手段】 本発明は、直列接続された複数の光電変換素子と光源を有する高圧電源を備え、光源から照射して光により複数の光電変換素子で発生する高電圧を荷電粒子源に印加する荷電粒子線装置に関する。本発明によれば、出力される高電圧は交流成分を含まず、荷電粒子線から放出される荷電粒子が、それ自身が本来持つエネルギー広がりのみを持って加速されるため、ビーム収束性能の劣化やエネルギー分解能の劣化が起こらない。このため、高いビーム収束性能、高いエネルギー分析性能の荷電粒子線装置を実現でき、装置の小型化も可能となる。【選択図】 図１