SEMICONDUCTOR APPARATUS MANUFACTURING METHOD, SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR DEVICE

• Main Authors: ISHIZUKA NOBUTAKA, MIKAWA MASAHITO, UENO KENICHIRO, OSHINO HIROSHI, MATSUBARA HISAKI
• Format: Patent
• Language: English; Japanese
• Published: 22.12.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can reduce a process which requires a special work such as a convex brim cutting process by circle cut and the like and a process which needs to handle a thin semiconductor wafer having no convex brim, and suppress ge...