CHARGED PARTICLE BEAM DEVICE, AND SAMPLE LIFTING DEVICE

• Main Authors: SHIMIZU TOSHIHIKO, SHIBATA NOBUO, MORIWAKI YUSUKE, KITSUNAI HIROYUKI, SUGAYA MASAKAZU, TERADA KOICHI, OGAWA HIRONORI, NAKAGAWA SHUICHI
• Format: Patent
• Language: English; Japanese
• Published: 22.12.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To materialize a sample lifting device capable of easily coping with an increase in a sample diameter while having a light-weight, high rigidity, and little directional independence, as a sample lifting device disposed on a horizontal movement mechanism.SOLUTION: This sample lifting device has first and second lifting mechanism for lifting a sample stage to which a sample is fixed, first and second driving devices for individually driving and lifting the first and second lifting mechanisms, and a control part for synchronizing the lifting action of the first and second lifting mechanisms by the first and second driving devices with first and second control signals. The first lifting mechanism has a first deceleration mechanism for generating a first drive output obtained by decelerating a first drive input given from the first driving device in a direction different from the direction of the input, the second drive mechanism has a second deceleration mechanism for generating a second output obtained by decelerating a second drive input given from the second driving device in a direction different from the direction of the input, and the directions of the first and second inputs are mutually different and are not on the same straight line.SELECTED DRAWING: Figure 2 【課題】水平移動機構上に配置される試料昇降装置として、試料の大口径化にも容易に対応可能な、軽量かつ高剛性で、剛性の方向依存性の少ない試料昇降装置を実現する。【解決手段】試料昇降装置は、試料が固定される試料台を昇降させる第１及び第２の昇降機構と、第１及び第２の昇降機構を個別に昇降駆動させる第１及び第２の駆動装置と、第１及び第２の駆動装置による第１及び第２の昇降機構の昇降動作を第１及び第２の制御信号により同期させる制御部とを有し、第１の昇降機構は、第１の駆動装置から与えられる第１の駆動入力を、当該入力方向とは異なる方向に減速した第１の駆動出力を発生させる第１の減速機構を有し、第２の昇降機構は、第２の駆動装置から与えられる第２の駆動入力を、当該入力方向とは異なる方向に減速した第２の駆動出力を発生させる第２の減速機構を有し、第１及び第２の駆動入力の向きは互いに異なり、かつ同一直線上ではない。【選択図】図２