APPARATUS AND METHOD FOR MEASURING X RAY CRYSTAL ORIENTATION

• Main Author: OISHI HIROSHI
• Format: Patent
• Language: English; Japanese
• Published: 15.12.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an apparatus for measuring X ray crystal orientation, capable of simply detecting a diffracted X ray to measure crystal orientation even when the surface to be measured of a single crystal sample has a large shift angle to a crystal plane other than a deviation angle.SOLUTION: An apparatus for measuring the crystal orientation of a surface to be measured of a single crystal sample using an X ray comprises: X ray irradiation means for irradiating the surface to be measured of the single crystal sample with the X ray; sample rotation means capable of passing through the center of the single crystal sample and rotating around a rotation axis parallel to the surface to be measured and having a rotation axis direction perpendicular to a flat surface including the optical axis of the X ray incident on the surface to be measured and the normal of the surface to be measured having the incident optical axis; X ray detection means for detecting the diffracted X ray of the X ray irradiated on the surface to be measured of the single crystal sample from the X ray irradiation means; and movable means for moving the X ray detection means in a direction perpendicular to the flat surface including the optical axis and the normal.SELECTED DRAWING: Figure 1 【課題】試料単結晶の被測定面が結晶面に対して偏差角の他に大きなあおり角を持っている場合であっても、簡便に回折Ｘ線を検出して、結晶方位を測定することができるＸ線結晶方位測定装置を提供することを目的とする。【解決手段】試料単結晶の被測定面の結晶方位をＸ線を用いて測定するための装置であって、試料単結晶の被測定面にＸ線を照射するＸ線照射手段と、試料単結晶の中心を通り、被測定面に平行な回転軸を中心として回転可能とし、回転軸の方向が被測定面に入射するＸ線の光軸と光軸が入射する被測定面の法線とが含まれる平面に垂直方向である試料回転手段と、Ｘ線照射手段から試料単結晶の被測定面上に照射されたＸ線の回折Ｘ線を検出するＸ線検出手段と、光軸と法線が含まれる平面に垂直な方向にＸ線検出手段を移動可能とする可動手段を有するものであることを特徴とするＸ線結晶方位測定装置。【選択図】図１