A/D CONVERTER

• Main Authors: NAKA JUNICHI, MIKI TAKUJI, OZEKI TOSHIAKI
• Format: Patent
• Language: English; Japanese
• Published: 08.12.2016
• Subjects: BASIC ELECTRONIC CIRCUITRY; CODE CONVERSION IN GENERAL; CODING; DECODING; ELECTRICITY

PROBLEM TO BE SOLVED: To prevent discontinuous characteristics from appearing in output characteristics of an A/D converter even if a variation in a gradient shape is generated in a density of wiring or characteristics of a transistor within a semiconductor wafer face in a semiconductor manufacturing process.SOLUTION: The A/D converter comprises: a plurality of fundamental A/D converters (A/D[00] to A/D[15]) that are disposed in an array shape; a control part (20) that causes the plurality of fundamental A/D converters to perform interleave operations; and an output part (30) by which output signals that are A/D converted by the fundamental A/D converters are combined and outputted. The fundamental A/D converters of which the interleave operations are performed sequentially, are disposed adjacently to each other in a lateral direction or a longitudinal direction.SELECTED DRAWING: Figure 1 【課題】半導体製造過程において半導体ウェハ面内で配線の密度やトランジスタの特性に傾斜状のばらつきが発生しても、ＡＤ変換器の出力特性に不連続な特性が表れることを抑制する。【解決手段】アレイ状に配置された複数の基本ＡＤ変換器（Ａ／Ｄ［００］〜Ａ／Ｄ［１５］）と、複数の基本ＡＤ変換器をインタリーブ動作させる制御部（２０）と、各基本ＡＤ変換器がＡＤ変換した出力信号を合成して出力する出力部（３０）とを備え、インタリーブ動作の順番が前後関係にある基本ＡＤ変換器同士は、横方向或いは縦方向に隣接して配置されている。【選択図】図１