ACOUSTIC WAVE JOINING METHOD

• Main Authors: ITO YOSHIHIRO, KAMIYA MAYUMI, TAKAZONO KENJI, SATO SHIGERU, ISHII RYOICHI
• Format: Patent
• Language: English; Japanese
• Published: 24.11.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

PROBLEM TO BE SOLVED: To simplify steps by joining laminated metal members by changing a metal nano paste into a metal layer of metal nano particles with an acoustic wave vibration with larger vibration energy than an ultrasonic vibration.SOLUTION: A joining object member 14 is a laminate obtained by laminating a lower side metal member 15 and an upper side metal member 16 with a metal nano paste 17 interposed therebetween. When the joining object member 14 is compressed by being held between a resonator 9 and a pedestal 13 and the resonator 9 is resonated with an acoustic wave vibration transmitted from a vibrator 12, a vibration in the lateral direction indicated by an arrow X is given to the lower side metal member 15, the upper side metal member 16 and the metal nano paste 17, the metal nano paste 17 receives friction due to the compression and vibration, an organic material such as dispersant and diluent in the metal nano paste 17 evaporates, and metal nano particles with small electric resistivity such as gold, silver, copper and aluminum in the metal nano paste 17 are changed into a metal layer 18 to join the lower side metal member 15 and the upper side metal member 16.SELECTED DRAWING: Figure 1 【課題】超音波振動よりも振動のエネルギの大きな音波振動で金属ナノペーストを金属のナノ粒子の金属層に変化させて積層状の金属部材を接合し、工程の簡素化を図る【解決手段】接合対象部材１４は下側金属部材１５と上側金属部材１６とが金属ナノペースト１７を介在させて重ね合わされた積層体になっている。この接合対象部材１４が共振器９と受台１３とで挟まれて加圧され、共振器９が振動子１２から伝達された音波振動に共振すると、この矢印Ｘで示した横方向の振動が下側金属部材１５と上側金属部材１６と金属ナノペースト１７とに付与され、金属ナノペースト１７が上記加圧と上記振動による摩擦とを受け、金属ナノペースト１７中の分散剤や希釈剤等の有機材が蒸発し、金属ナノペースト１７中の金・銀・銅・アルミニウム等の電気抵抗率の小さな金属のナノ粒子が金属層１８に変化して下側金属部材１５と上側金属部材１６とを接合する。【選択図】図１