SURFACE-TREATED ALUMINUM MATERIAL AND METHOD FOR PRODUCING THE SAME

PROBLEM TO BE SOLVED: To provide a dense surface-treated aluminum material excellent in the suppression capacity of corrosion resistance, wear resistance and outgas to corrosive chlorine gas and plasma introduced into a vacuum device such as a CVD device and a PVD device and an etching device for a...

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Bibliographic Details
Main Authors MURANAKA TAKEHIKO, MAE HIDEO, KAWAMOTO ISAO
Format Patent
LanguageEnglish
Japanese
Published 17.11.2016
Subjects
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