SURFACE-TREATED ALUMINUM MATERIAL AND METHOD FOR PRODUCING THE SAME
PROBLEM TO BE SOLVED: To provide a dense surface-treated aluminum material excellent in the suppression capacity of corrosion resistance, wear resistance and outgas to corrosive chlorine gas and plasma introduced into a vacuum device such as a CVD device and a PVD device and an etching device for a...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
17.11.2016
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Subjects | |
Online Access | Get full text |
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