GAS PURGE DEVICE, LOAD PORT DEVICE, INSTALLATION BASE OF CONTAINER TO BE PURGED, AND GAS PURGE METHOD

PROBLEM TO BE SOLVED: To provide a gas purge device capable of filling inside a container to be purged with cleaning gas without tilting the container to be purged, a load port device, an installation base of a container to be purged, and a gas purge method.SOLUTION: On the basis of a fixed detectio...

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Bibliographic Details
Main Authors EMOTO ATSUSHI, IWAMOTO TADAMASA
Format Patent
LanguageEnglish
Japanese
Published 10.11.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a gas purge device capable of filling inside a container to be purged with cleaning gas without tilting the container to be purged, a load port device, an installation base of a container to be purged, and a gas purge method.SOLUTION: On the basis of a fixed detection signal detected by a fixed detection sensor 40 that a container 2 to be purged is fixed against a table 14, control means 80 drives a nozzle drive mechanism 20 and moves a purge nozzle 28 toward a purge port 5.SELECTED DRAWING: Figure 3A 【課題】パージ対象容器を傾かせることなく、パージ対象容器の内部を清浄化ガスで満たすことが可能なガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法を提供すること。【解決手段】固定検出センサ４０により、テーブル１４に対してパージ対象容器２が固定されていることを検出された固定検出信号に基づき、制御手段８０は、ノズル駆動機構２０を駆動し、パージノズル２８を、パージポート５に向けて移動させる。【選択図】図３Ａ
Bibliography:Application Number: JP20150071641