PHOTOCONDUCTIVE ELEMENT, MEASUREMENT DEVICE AND MANUFACTURING METHOD

• Main Authors: KAMO YOSHIHIKO, KURITA NOBUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2016
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a photoconductive element capable of achieving both efficient generation of carriers due to an irradiation of a laser beam and suppression of loss of a current signal flowing through a pair of electrode layers in accordance with carriers, while avoiding complexity in manufacturing processes.SOLUTION: A photoconductive element (110, 130) is irradiated with a laser beam (LB1, LB2) to emit or detect an electromagnetic wave (THz). The photoconductive element includes a substrate (111), a photoconductive layer (112) and a pair of electrode layers (113a, 113b). Each of the pair of electrode layers includes: (i) a second electrode portion (113a-2, 113b-2) adjacent to a gap portion (114) where is to be irradiated with the laser beam; and (ii) a first electrode portion (113a-1, 113b-1) electrically connected to the second electrode portion. The transmittance of the second electrode portion with respect to the laser beam is larger than the transmittance of the first electrode portion with respect to the laser beam.SELECTED DRAWING: Figure 3 【課題】製造工程の複雑化を回避しつつも、レーザ光の照射に起因したキャリアの効率的な生成及びキャリアに応じて一対の電極層に流れる電流信号の損失の抑制を両立する。【解決手段】光伝導素子（１１０、１３０）は、レーザ光（ＬＢ１、ＬＢ２）の照射を受けることで電磁波（ＴＨｚ）を出射又は検出する光伝導素子であって、基板（１１１）と、光伝導層（１１２）と、一対の電極層（１１３ａ、１１３ｂ）とを備え、一対の電極層の夫々は、（ｉ）レーザ光が照射されるべきギャップ部（１１４）に隣接する第２電極部（１１３ａ−２、１１３ｂ−２）と、（ｉｉ）第２電極部に電気的に接続される第１電極部（１１３ａ−１、１１３ｂ−１）とを備えており、レーザ光に対する第２電極部の透過率は、レーザ光に対する第１電極部の透過率よりも大きい。【選択図】図３