HIGH PERFORMANCE INDUCTION PLASMA TORCH

• Main Authors: NICOLAS DIGNARD, BOULOS MAHER I, SEBASTIEN THELLEND, ALEXANDRE AUGER, JERZY JUREWICZ
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2016
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

PROBLEM TO BE SOLVED: To increase output/energy density to a plasma discharge cavity by removing arc generation without losing energy coupling efficiency.SOLUTION: An induction plasma torch includes: a tubular torch body; a plasma enclosure pipe that is disposed coaxially within the tubular torch body; a gas distributor head which is disposed in one end of the plasma enclosure pipe and supplies at least one gaseous material into the plasma enclosure pipe; an induction coupling member for adding an energy for generating and maintaining plasma within the plasma enclosure pipe; and a capacitive shield including a film of a conductive material applied over an outer surface of the plasma enclosure pipe or an inner surface of the tubular torch body. The film of the conductive material is divided into axial strips that are interconnected in one end. The film of the conductive material has thickness that is smaller than calculated skin thickness. An axial groove is fabricated on the outer surface of the plasma enclosure pipe or the inner surface of the tubular torch body and may be disposed between the axial strips.SELECTED DRAWING: Figure 6 【課題】エネルギー結合効率を損失することなくアーク発生を除去し、プラズマ放電キャビティへの出力／エネルギー密度を増加させる。【解決手段】誘導プラズマトーチは、管状トーチ本体と、管状トーチ本体内に同軸上に配置されたプラズマ閉込管と、プラズマ閉込管の一方の端部に配置され、プラズマ閉込管内に少なくとも１つの気体状物質を供給するガス分配器ヘッドと、プラズマ閉込管内にプラズマを生成および維持するエネルギーを加えるための誘導結合部材と、プラズマ閉込管の外側表面または管状トーチ本体の内側表面に施された導電材料の膜を含む容量性シールド部とを含む。導電材料の膜は、一方の端部において相互接続された軸方向ストリップに分割される。導電材料の膜は、計算される表皮厚さよりも小さい厚さを有する。軸方向溝は、プラズマ閉込管の外側表面または管状トーチ本体の内側表面に加工され、軸方向ストリップ間に配置され得る。【選択図】図６