MICROWAVE IRRADIATION DEVICE AND MICROWAVE IRRADIATION METHOD

PROBLEM TO BE SOLVED: To provide a microwave irradiation device in which emission of a microwave from a microwave source is unlikely to be stopped unnecessarily based on a detection result of a temperature of an output window.SOLUTION: The device comprises: a microwave source 10 by which a microwave...

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Bibliographic Details
Main Authors AWAKURA YASUTAKA, MAEDA SHINSAKU, AKAO TAKAYOSHI
Format Patent
LanguageEnglish
Japanese
Published 10.11.2016
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Online AccessGet full text

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Summary:PROBLEM TO BE SOLVED: To provide a microwave irradiation device in which emission of a microwave from a microwave source is unlikely to be stopped unnecessarily based on a detection result of a temperature of an output window.SOLUTION: The device comprises: a microwave source 10 by which a microwave of which the frequency is 10 GHz to 300 GHz is generated and emitted from an output window 11a; a reflection mechanism 20 which reflects and converges the microwave that is emitted from the output window 11a; and a mounting platform 30 on which an object (heated object) to be irradiated with the microwave reflected by the reflection mechanism 20 is mounted. In the device, a permeation plate formed from a "microwave permeable material" of which the "half reduction depth" is 100 mm or more is interposed in a region where the microwave is passed, between the "output window 11a" and the "heated object mounted on the mounting platform 30". The permeation plate also has a property that an infrared ray is not permeated (an infrared ray is absorbed). Further, a cooling device 50 that cools the permeation plate is provided.SELECTED DRAWING: Figure 3 【課題】出力窓の温度の検出結果に基づいてマイクロ波源からのマイクロ波の放出が不必要に停止され難いマイクロ波照射装置を提供すること。【解決手段】この装置は、周波数が10GHz〜300GHzのマイクロ波を発生して出力窓11aから放出するマイクロ波源10と、出力窓11aから放出されたマイクロ波を反射して集光する反射機構20と、反射機構20によって反射されたマイクロ波が照射される対象(被加熱体)が載置される載置台30と、を備える。この装置は、「出力窓11a」と「載置台30に載置された被加熱体」との間におけるマイクロ波が通過する領域に、「半減深さ」が100mm以上である「マイクロ波を透過する材料」からなる透過板が介在させられる。この透過板は、赤外線を透過しない(赤外線を吸収する)特性をも有する。更に、この透過板を冷却する冷却装置50が設けられる。【選択図】図3
Bibliography:Application Number: JP20150070510