ATOMIZER AND DEPOSITION SYSTEM

• Main Authors: ODA SHINYA, SASAKI TAKAHIRO, HITORA TOSHIMI
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2016
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; ATOMISING APPARATUS; NOZZLES; PERFORMING OPERATIONS; SPRAYING APPARATUS; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To provide an atomizer which achieves excellent mist controllability and generates uniform mist suitable for deposition.SOLUTION: An atomizer includes: a bottomless cylindrical body; an ultrasonic transmission liquid tank in which an ultrasonic transmission liquid is stored and at least a bottom surface part of the cylindrical body is immersed in the ultrasonic transmission liquid; and an ultrasonic vibrator which is provided at the ultrasonic transmission liquid tank and irradiates the bottom surface part of the cylindrical body with an ultrasonic wave. The cylindrical body and the ultrasonic transmission liquid tank are fitted or threadedly engaged through an ultrasonic permeable base material to cause the bottom surface part of the cylindrical body to be closed with the ultrasonic permeable base material so that the cylindrical body can store a raw material liquid for atomization. Deposition is performed by using the atomizer.SELECTED DRAWING: Figure 1 【課題】ミストの制御性に優れており、成膜に適した均質なミストを生成可能な霧化装置を提供する。【解決手段】無底の筒状体と、超音波伝達液を収容し、前記超音波伝達液に少なくとも前記筒状体の底面部を浸漬させる超音波伝達液槽と、前記超音波伝達液槽に設けられ、前記筒状体の底面部に対して超音波を照射する超音波振動子とを具備し、超音波透過性基材を介して前記筒状体と前記超音波伝達液槽とが嵌合または螺合されることにより、前記筒状体が霧化用原料液を収容可能となるように、前記筒状体の底面部が前記超音波透過性基材によって閉塞される霧化装置を用いて成膜する。【選択図】図１