METHOD FOR MANUFACTURING DIAMOND FILM, HOT FILAMENT CVD APPARATUS AND MECHANICAL SEAL
PROBLEM TO BE SOLVED: To provide a method for manufacturing a diamond film, capable of depositing the diamond film at a low cost.SOLUTION: The method for manufacturing a diamond film using a hot filament CVD apparatus including a film deposition chamber, a base material table, a filament to be heate...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
13.10.2016
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Subjects | |
Online Access | Get full text |
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