LIGHT SOURCE DEVICE, MEASUREMENT DEVICE, AND ENCODER

PROBLEM TO BE SOLVED: To provide a light source device having an output wavelength that is the same as gas laser having high frequency accuracy of output light and outputting a high power laser beam.SOLUTION: A light source device includes: a first wavelength-variable laser 10 for outputting first l...

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Bibliographic Details
Main Author KAMIYA SABURO
Format Patent
LanguageEnglish
Japanese
Published 06.10.2016
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Summary:PROBLEM TO BE SOLVED: To provide a light source device having an output wavelength that is the same as gas laser having high frequency accuracy of output light and outputting a high power laser beam.SOLUTION: A light source device includes: a first wavelength-variable laser 10 for outputting first light; a second wavelength-variable laser 12 for outputting second light; a sum frequency generation module 16 for generating third light that is sum frequency of the first light and the second light as output light; and a wavelength stabilizer 25 for stabilizing the output wavelength of the first wavelength-variable laser 10 and the output wavelength of the second wavelength-variable laser 12, based on one of the first light and second light and the third light.SELECTED DRAWING: Figure 4 【課題】出力光の周波数確度が高いガスレーザと同一の出力波長を有し、かつハイパワーなレーザ光を出射する光源装置を提供する。【解決手段】光源装置は、第1の光を出力する第1波長可変レーザ10と、第2の光を出力する第2波長可変レーザ12と、第1の光と第2の光との和周波である第3の光を出力光として発生する和周波発生モジュール16と、第1の光及び第2の光の一方と、第3の光と、に基づいて、第1波長可変レーザ10の出力波長と、第2波長可変レーザ12の出力波長とを安定化させる波長安定化装置25と、を備えている。【選択図】図4
Bibliography:Application Number: JP20150056218