ANGULAR VELOCITY SENSOR

• Main Author: ANO TAKASHI
• Format: Patent
• Language: English; Japanese
• Published: 06.10.2016
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

PROBLEM TO BE SOLVED: To provide an angular velocity sensor with which it is possible to reduce the effect of thermal stress exerted on the detection accuracy of a sensor element.SOLUTION: In an angular velocity sensor 101, a sensor element 1 has a sensor base 3 consisting of a piezoelectric material, and an excitation electrode 5 and a detection electrode 7 provided on the sensor base 3. A mounting base 111 has an insulating base 119 consisting of a material different from the material of the sensor base 3, and a plurality of external terminals 125 provided on the insulating base 119. The angular velocity sensor 101 has an intermediate base 129 consisting of the same material as the material of the sensor base 3 and, by being joined to the sensor element 1 and also joined to the mounting base 111, making the mounting base 111 indirectly hold the sensor element 1.SELECTED DRAWING: Figure 8 【課題】熱応力がセンサ素子の検出精度に及ぼす影響を低減できる角速度センサを提供する。【解決手段】角速度センサ１０１において、センサ素子１は、圧電材料からなるセンサ基体３と、センサ基体３に設けられた励振電極５及び検出電極７とを有し、実装基体１１１は、センサ基体３の材料とは異なる材料からなる絶縁基体１１９と、絶縁基体１１９に設けられた複数の外部端子１２５とを有している。角速度センサ１０１は、センサ基体３の材料と同一の材料からなり、センサ素子１と接合されるとともに実装基体１１１と接合されることによりセンサ素子１を実装基体１１１に間接的に保持させる中間基体１２９を有している。【選択図】図８