SUBSTRATE LAMINATION SYSTEM AND METHOD

PROBLEM TO BE SOLVED: To provide a method and apparatus for positioning and laminating a plurality of substrates, which can protect the substrates from impacts.SOLUTION: A method comprises: disposing a second substrate 102 on a support surface of a planarization tool; disposing a pressure-sensitive...

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Bibliographic Details
Main Authors JAMES D SAMPICA, JOSEPH L TCHON, PAUL R NEMETH, VINCENT P MARZEN, TRACY J BARNIDGE
Format Patent
LanguageEnglish
Japanese
Published 06.10.2016
Subjects
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