SUBSTRATE LAMINATION SYSTEM AND METHOD
PROBLEM TO BE SOLVED: To provide a method and apparatus for positioning and laminating a plurality of substrates, which can protect the substrates from impacts.SOLUTION: A method comprises: disposing a second substrate 102 on a support surface of a planarization tool; disposing a pressure-sensitive...
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Main Authors | , , , , |
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Format | Patent |
Language | English Japanese |
Published |
06.10.2016
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Subjects | |
Online Access | Get full text |
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