LIQUID SPRAY HEAD

• Main Authors: SHIMIZU TOSHIHIRO, HIRAI EIKI, TAKABE HONKI, ITAYAMA YASUHIRO, NAKAYAMA MASAO
• Format: Patent
• Language: English; Japanese
• Published: 05.09.2016
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide a liquid spray head comprising a piezoelectric element which allows an insulator film to be thinned while controlling a crystal property of a piezoelectric body layer.SOLUTION: The liquid spray head has a piezoelectric element 300 arranged on a flow path forming substrate 10, applies pressure to liquid filled into a pressure generating chamber 12 by displacement of a vibration film 50 caused by driving the piezoelectric element 300 so as to discharge the liquid from a nozzle opening 21 through the nozzle opening 21. The piezoelectric element 300 has: an insulator film 55 to be formed on the vibration film 50; a first electrode film 60 to be formed on the insulator film 55; a piezoelectric body layer 70 to be formed on the first electrode film 60; and a second electrode film 80 to be formed on the piezoelectric body layer 70. Further, the insulator film 55 has a lower insulator film formed on the vibration film 50 and an upper insulator film, formed on the lower insulator film, which is made of the same material as the lower insulator film and has a crystal structure different from the lower insulator film.SELECTED DRAWING: Figure 1 【課題】圧電体層の結晶性を制御しながら絶縁体膜の薄膜化を可能にする圧電素子を備えた液体噴射ヘッドを提供する。【解決手段】流路形成基板１０上に配設された圧電素子３００を有し、該圧電素子３００の駆動に伴う振動膜５０の変位により、圧力発生室１２内に充填された液体に圧力を作用させ、ノズル開口２１を介して前記液体を前記ノズル開口２１から吐出する液体噴射ヘッドであって、圧電素子３００は、振動膜５０上に形成される絶縁体膜５５と、該絶縁体膜５５上に形成される第１電極膜６０と、該第１電極膜６０上に形成される圧電体層７０と、該圧電体層７０上に形成される第２電極膜８０とを有し、さらに絶縁体膜５５は、振動膜５０上に成膜した下絶縁体膜と、該下絶縁体膜上に成膜した前記下絶縁体膜と同一材料で結晶構造が異なる上絶縁体膜とを有する。【選択図】 図１