BUBBLE GENERATING METHOD BY ELECTRIFICATION OF GAS AND APPLICATION THEREOF TO CLEANING

• Main Authors: YAMADA TOMIO, HARADA TETSUO, KONISHI NOBUO
• Format: Patent
• Language: English; Japanese
• Published: 01.09.2016
• Subjects: APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS; CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING ORPROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMISTRY; DISPOSAL OF SOLID WASTE; EARTH DRILLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; FIRE-FIGHTING; FIXED CONSTRUCTIONS; GALLERIES; HUMAN NECESSITIES; LARGE UNDERGROUND CHAMBERS; LIFE-SAVING; METALLURGY; MINING; PERFORMING OPERATIONS; PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS; RECLAMATION OF CONTAMINED SOIL SOIL; SEMICONDUCTOR DEVICES; SHAFTS; TRANSPORTING; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE; TUNNELS

PROBLEM TO BE SOLVED: To provide a method of forming functional bubbles having kinetic energy exerting attractive force by passing a gas through a strong negative or positive magnetic field to charge the gas with static electricity and causing the charged gas to generate bubbles forming a homopolar repulsive magnetic field, and a method of applying the bubbles to various cleaning.SOLUTION: A cleaning method includes: forming a fluid cleaning liquid by negatively electrostatically charging a hydrogen gas in ultrapure water; spraying the mixture droplets onto a silicon wafer at high rate to negatively electrostatically charge fine foreign substances on the silicon wafer, which facilitates reduction cleaning by virtue of the homopolar repulsive action. The bubbles also function for bubble shot blasting and thus exert double functions of cleaning blast and bubble blast since the bubbles gather at the center under the own centrifugal force although the bubbles have random diameters in a microbubble generator using the hydrogen gas.SELECTED DRAWING: Figure 1 【課題】気体に(-)とか(+)の強磁場中を通過させて静電気を帯びた気体とし、この気体で泡を発生させ同極反撥磁場の泡を作り、互いに引き合う運動エネルギーを持った機能的泡を作りこれを各種の洗浄に応用する方法を提供する。【解決手段】超純水中に水素ガスに（−）の静電気を帯電させて流体洗浄液を作り，高速でシリコンウェアーに混合溶滴を噴射する事でシリコンウェアー上の微細異物は（−）の静電気を帯びている為，同極反撥作用にて素早く還元洗浄が完了する。水素ガスによるマイクロバブル発生装置内でランダム径でありながら自己遠心力では泡は中芯に集る為気泡ショットブラストとしても働く為，洗浄ブラスト＋気泡ブラストの２種の働きをする。【選択図】図１