ELECTRON BEAM LITHOGRAPHY DEVICE

• Main Authors: MUROFUSHI TATSUYA, TSUCHIYA SEIICHI, MINE AKIKANE
• Format: Patent
• Language: English; Japanese
• Published: 22.08.2016
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an electron beam lithography device that can secure a sufficient time for which an operation check of a deflection amplifier can be performed.SOLUTION: An electron beam lithography device includes a deflector for deflecting an electron beam to be incident to a sample, a first DA converter for outputting a voltage signal corresponding to an input signal from an output terminal to the deflector, a second DA converter which outputs a voltage signal corresponding to the input signal from an output terminal and is different from the first DA converter, a first cable for connecting the output terminal of the first DA converter and the deflector, a second cable which has one end connected to the output terminal of the second DA converter and whose impedance is substantially equal to the impedance of the first cable, a comparator for outputting a comparison result of the voltage signal from the first DA converter and the voltage signal from the second DA converter, and a diagnosis device for diagnosing the output of the first DA converter based on the output from the comparator.SELECTED DRAWING: Figure 3 【課題】偏向アンプの動作チェックを行うことが可能な時間を十分に確保する。【解決手段】電子線描画装置は、試料へ入射する電子線を偏向する偏向器と、入力信号に応じた電圧信号を出力端子から前記偏向器へ出力する第１のＤＡ変換器と、前記入力信号に応じた電圧信号を出力端子から出力する、前記第１のＤＡ変換器とは異なる第２のＤＡ変換器と、前記第１のＤＡ変換器の出力端子と前記偏向器とを接続する第１のケーブルと、一端が前記第２のＤＡ変換器の出力端子に接続され、前記第１のケーブルとインピーダンスがほぼ等しい第２のケーブルと、前記第１のＤＡ変換器からの電圧信号と、前記第２のＤＡ変換器からの電圧信号を比較した結果を出力する比較器と、前記比較器からの出力に基づいて、前記第１のＤＡ変換器の出力診断を行う診断装置と、を有する。【選択図】図３