ELEMENT ANALYSIS METHOD

• Main Authors: IWABUCHI MOTOAKI, KAWABATA KATSUHIKO, KOBAYASHI MICHIAKI, TANEDA YOSHINORI, MORISAWA TAKUMI, OGIWARA TSUTOMU, KANO MITSUMASA, HOSHI YUKIO
• Format: Patent
• Language: English; Japanese
• Published: 11.07.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an element analysis method capable of analyzing impurity elements in a sample including a silicon containing compound with accuracy 1,000 times compared with conventional one while preventing an element analyzer from being blocked by the deposition of a silicon matrix.SOLUTION: The method for analyzing impurity elements in a sample including a silicon containing compound comprises: decomposing the silicon containing compound included in the sample using an automatic vapor phase decomposition apparatus including at least a heating mechanism, a liquid sending mechanism and a conveyance mechanism; removing a silicon part in the sample after the decomposition to prepare a sample for element analysis; automatically injecting the prepared sample for element analysis into the element analyzer; and analyzing impurity elements in the sample for element analysis.SELECTED DRAWING: Figure 1 【課題】ケイ素マトリックスの析出による元素分析装置の閉塞を防止しながら、ケイ素含有化合物を含む試料中の不純物元素を従来の１，０００倍の精度で分析することができる元素分析方法を提供する。【解決手段】ケイ素含有化合物を含む試料中の不純物元素を分析する方法であって、少なくとも加熱機構、送液機構、及び搬送機構が具備された自動気相分解装置を用いて、前記試料中に含まれるケイ素含有化合物を分解し、該分解後の試料中のケイ素分を除去して元素分析用試料を調製し、該調製した元素分析用試料を自動で元素分析装置に注入して、前記元素分析用試料中の不純物元素を分析する元素分析方法。【選択図】図１