SUBSTRATE LIQUID PROCESSING APPARATUS

• Main Authors: KOMIYA YOJI, TANAKA KOJI, UMENO SHINICHI, SATO TAKAZO, ANAMOTO ATSUSHI, TAKAGI YASUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 23.06.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a substrate liquid processing apparatus capable of space saving.SOLUTION: A substrate liquid processing apparatus according to one aspect of an embodiment includes a transport unit, a processing unit, a reservoir, and a feeding mechanism. A transport device for trans...