PHASE DIFFERENCE INTERFERENCE MICROSCOPE DEVICE

• Main Authors: SHIMIZU ISAO, UNO KATSUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 20.06.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a phase difference interference microscope device that does not cause an interference image a phase skip even if a sample has a thickness exceeding a wavelength.SOLUTION: A phase difference interference microscope comprises: a generation optical system 200 that divides light 600 to be generated by a light source 110 into illumination light 610 and reference light 640 by a division beam splitter 250; an illumination optical system 300 that irradiates an analyte 130 with the illumination light 610; a measurement optical system 400 that performs a Fourier transformation of transmission light 620 passing through the analyte 130 and object light 630 coming out from the analyte 130 of the illumination light 610 by a lens 410, gives a phase change with respect to a spatial frequency spectrum of the analyte 130 by a spatial optical modulator 420, and once again performs the Fourier transformation of the transmission light and the object light by lenses 430, 440 and 460 to irradiate a light reception element 140 via a synthesis beam splitter 470; a reference optical system 500 that causes the synthesis beam splitter 470 to synthesize the reference light 640 with the transmission light 620 and the object light 630; and a control processing system 700 that performs image processing of light received by the light reception element 140 and visualizes the light.SELECTED DRAWING: Figure 1 【課題】波長を上回る厚さのある標本でも、干渉像に位相の飛びが起こらない位相差干渉顕微装置を提供する。【解決手段】光源１１０で発生させた光６００を分割用ビームスプリッタ２５０で照明光６１０と参照光６４０に分割する発生光学系２００と、照明光６１０を被検体１３０に照射する照明光学系３００と、照明光６１０のうち被検体１３０を透過した透過光６２０と被検体１３０から出た物体光６３０をレンズ４１０でフーリエ変換し、空間光変調器４２０で被検体１３０の空間周波数スペクトルに対して位相変化を与え、再度レンズ４３０、４４０、４６０でフーリエ変換した上で、合成用ビームスプリッタ４７０を介して受光素子１４０に照射する測定光学系４００と、参照光６４０を合成用ビームスプリッタ４７０で透過光６２０及び物体光６３０と合成させる参照光学系５００と、受光素子１４０で取得した光を画像処理して可視化する制御処理系７００とを備える。【選択図】図１