MULTIBEAM X-RAY SYSTEM

• Main Authors: BORIS VERMAN, MICHAEL YOUNG, JIANG LICAI
• Format: Patent
• Language: English; Japanese
• Published: 09.06.2016
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GAMMA RAY OR X-RAY MICROSCOPES; IRRADIATION DEVICES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TRANSPORTING; X-RAY TECHNIQUE

PROBLEM TO BE SOLVED: To provide a probe beam system which can deliver beams having different characteristics by a multibeam X-ray optical system.SOLUTION: A multibeam X-ray beam system includes: an X-ray source 24 which radiates an X ray; and a housing having a first part and a second part. The second part is removable to the first part, and includes a plurality of optical systems 20, 22 of different performance characteristics. An optical system receives the X ray from the X-ray source. Each optical system is disposed in an operation position through the movement of the second part relative to the first part in a manner to direct an X ray having a desired performance attribute to a desired position 30.SELECTED DRAWING: Figure 2 【課題】マルチビームＸ線光学システムにより異なる特性のビームを配送することができるプローブビームシステムを提供する。【解決手段】マルチビームＸ線ビームシステムは、Ｘ線を放射するＸ線源２４と、第１の部分と第２の部分をもったハウジングを含む。第２の部分は第１の部分に対して移動可能であり、異なる性能特性の複数の光学系２０、２２を含む。光学系がＸ線源からのＸ線を受け取り、望ましい性能属性をもったＸ線を望ましい位置３０に向かせるように、各光学系が第１の部分に対する第２の部分の動きを通して作動位置に配置される。【選択図】図２