GAS PURGE UNIT AND GAS PURGE DEVICE
PROBLEM TO BE SOLVED: To provide a gas purge unit which conducts gas replacement in a purge object container uniformly, in particular, in a vertical direction, and to provide a gas purge device.SOLUTION: A gas purge unit 20 introduces a cleaning gas into a purge object container 2 having an opening...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
30.05.2016
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a gas purge unit which conducts gas replacement in a purge object container uniformly, in particular, in a vertical direction, and to provide a gas purge device.SOLUTION: A gas purge unit 20 introduces a cleaning gas into a purge object container 2 having an opening 2b through the opening 2b. The gas purge unit 20 includes: a first nozzle port 26 which blows the cleaning gas from a side part of the opening 2b into the purge object container 2; and a second nozzle port 28 which blows the cleaning gas from the side part of the opening 2b along an opening surface of the opening 2b.SELECTED DRAWING: Figure 4A
【課題】パージ対象容器の内部を、特に上下方向で均一にガス置換することが可能なガスパージユニットおよびガスパージ装置を提供すること。【解決手段】開口2bを有するパージ対象容器2の内部に開口2bを通して清浄化ガスを導入させるガスパージユニット20である。このガスパージユニット20は、パージ対象容器2の内部に向けて、開口2bの側辺部から清浄化ガスを吹き出す第1ノズル口26と、開口2bの開口面に沿って開口2bの側辺部から清浄化ガスを吹き出す第2ノズル口28とを有する。【選択図】図4A |
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Bibliography: | Application Number: JP20140236227 |